Buffer chamber wafer heating mechanism and supporting robots

ABSTRACT

Buffer chamber including robots, a carousel and at least one heating module for use with a batch processing chamber are described. Robot configurations for rapid and repeatable movement of wafers into and out of the buffer chamber and cluster tools incorporating the buffer chambers and robots are described.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a Continuation of U.S. patent application Ser. No.15/099,760, filed Apr. 15, 2016, which claims priority to U.S.Provisional Application No. 62/150,271, filed Apr. 20, 2015, the entiredisclosures of which are hereby incorporated by reference herein.

TECHNICAL FIELD

Embodiments of the disclosure relate generally to methods and apparatusto preheat wafers in a cluster tool configuration without significantlyimpacting system throughput. In particular, embodiments of thedisclosure are directed to apparatus and methods to rapidly andefficiently preheat wafers including robot mechanisms to rapidly andefficiently move wafers from a preheating buffer chamber to a processingchamber.

BACKGROUND

The batch ALD platforms have a wide range of applications with variousrequirements and constraints that demands a flexible architecture.Platform requirements include wafer preheating, post cooling, preheat &post cool, throughput from 30 wph to 270 wph, high vacuum loadlocks, andnumerous other specifications. With the numerous parameters andindividual apparatus that make up the platform, it can be challenging toprovide functionality with low entitlement cost.

Some ALD platforms currently provide standard and active wafer coolingcapable loadlocks. The high temperature processes (>450° C.) require thewafer be preheated prior to being placed on the process chambersusceptor. In a conventional system, a room temperature wafer preheatedin the process chamber for as long as 3 minutes. This cost valuableprocessing time and significantly reduces system throughput for shorterprocesses.

Current products employ numerous methods to heat single wafers either ina loadlock or a separate process chamber. However, when using a batchALD platform with, for example, six wafers, heating single wafers in aseparate chamber or loadlock would not provide sufficient throughput.Single wafer loadlock cycles are too slow to the meet the wafer exchangebudget. Additionally, the transfer chambers used with batch processingchambers may not have another facet for a heating chamber. Even ifanother facet were available, vacuum robots cannot produce satisfactorythroughput with the additional handoff location. Accordingly, there is aneed in the art for apparatus and methods of preheating wafers for batchprocessing including robots capable of producing the sufficientthroughput.

SUMMARY

One or more embodiments of the disclosure are directed to bufferchambers comprising a housing with a carousel. The housing has a lid, afloor and at least one sidewall having at least two facets. Each of thefacets includes a slit valve sized to allow a wafer to passtherethrough. The carousel includes a wafer support having at least twowafer support positions. At least one heating module to heat a waferwhen supported by the wafer support. A wafer transfer robot is below thecarousel to move a wafer between one or more areas and at least one ofthe wafer support positions. A motor is connected to the carousel toindex the carousel so that at least one support position is aligned witha slit valve in one of the facets.

Additional embodiments of the disclosure are directed to wafer transferrobots comprising: an L-shaped boom having a first leg with a first end,a second leg with a second end, the first leg and second leg connectedat an angled portion; an armset attached to each of the first end andsecond send of the boom, each armset having a lower arm attached to theboom at a shoulder adjacent the first end or second end, an upper armattached to the lower arm at an elbow and a blade attached to the upperarm at a wrist; and a pulley which causes the shoulder, elbow and wristto extend substantially simultaneously so that the blade remainsparallel to the leg during extension.

Further embodiments of the disclosure are directed to wafer transferrobots comprising: an L-shaped boom having a first leg with a first end,a second leg with a second end, the first leg and second leg connectedat an angled portion; an armset attached to each of the first end andsecond send of the boom, each armset having a lower arm attached to theboom at a shoulder adjacent the first end or second end, an upper armattached to the lower arm at an elbow and a blade attached to the upperarm at a wrist; and a pulley which causes the shoulder, elbow and wristto extend substantially simultaneously so that the blade remainsparallel to the leg during extension. The transfer robot is a longarmset robot on a short boom so that the combined length of the armsetfrom should to an end of the blade has a length that is greater thanabout 2.5 times a length from a pivot point in the angled portion of theboom to the shoulder.

Additional embodiments of the disclosure are directed to wafer transferrobots comprising: an I-shaped boom having a first end, a second end anda pivot point; an armset attached to each of the first end and secondsend of the boom, each armset having a lower arm attached to the boom ata shoulder adjacent the first end or second end, an upper arm attachedto the lower arm at an elbow and a blade attached to the upper arm at awrist; and a pulley which causes the shoulder, elbow and wrist to extendsubstantially simultaneously so that the blade remains parallel to theleg during extension. The transfer robot is a long armset robot on ashort boom so that the combined length of the armset from should to anend of the blade has a length that is greater than about 2.5 times alength from a pivot point in the angled portion of the boom to theshoulder, and the boom is positioned at an angle in the range of about30° to about 60° relative to a major axis of the movement of the blades.

Some embodiments of the disclosure are directed to wafer transfer robotscomprising: a rotatable base; a first armset comprising a first lowerarm connected to the base at a first shoulder, a first upper armconnected to the first lower arm at a first elbow, a first bladeconnected the first upper arm at a first wrist, the first blade having afirst inner blade portion extending a first length from the first wristto a first lower corner, a first intermediate blade portion extendingperpendicularly from the first inner blade portion to a first uppercorner and a first outer blade portion extending perpendicular to thefirst intermediate blade portion in a direction away from and parallelto the first inner blade portion; and a second armset comprising asecond lower arm connected to the base at a second shoulder, a secondupper arm connected to the second lower arm at a second elbow, a secondblade connected to the second upper arm at a second wrist, the secondblade having a second inner blade portion extending a second length fromthe second wrist to a second lower corner, a second intermediate bladeportion extending perpendicularly from the second inner blade portion toa second upper corner and a second outer blade portion extendingperpendicularly to the second intermediate blade portion in a directionaway from and parallel to the second inner blade portion. The firstlength is greater than the second length and the first outer bladeportion and the second outer blade portion can support waferssubstantially coplanarly, and the second armset cannot extend until thefirst armset has extended and the first armset cannot retract until thesecond armset has retracted.

One or more embodiments of the disclosure are directed to wafer transferrobots comprising: a rotatable boom having an I-shape with a first endand a second end; a first armset comprising a first lower arm connectedto the boom at a first shoulder at the first end of the boom, a firstupper arm connected to the first lower arm at a first elbow, a firstblade connected the first upper arm at a first wrist, the first bladehaving a first inner blade portion extending a first length from thefirst wrist to a first lower corner, a first intermediate blade portionextending perpendicularly from the first inner blade portion to a firstupper corner and a first outer blade portion extending perpendicular tothe first intermediate blade portion in a direction away from andparallel to the first inner blade portion; and a second armsetcomprising a second lower arm connected to the boom at a second shoulderat the second end of the boom, a second upper arm connected to thesecond lower arm at a second elbow, a second blade connected to thesecond upper arm at a second wrist, the second blade having a secondinner blade portion extending a second length from the second wrist to asecond lower corner, a second angled blade portion extending at an angleto and along the plane of the second inner blade portion, a secondintermediate blade portion extending perpendicularly from the secondangled blade portion to a second upper corner and a second outer bladeportion extending in a plane perpendicular to the second intermediateblade portion in a direction away from, parallel to and offset from thesecond inner blade portion. When in the retracted position, the secondouter blade portion is above the first inner blade portion and the firstouter blade portion is above and offset from the second inner bladeportion, and the first outer blade portion and the second outer bladeportions are substantially coplanar.

Further embodiments of the disclosure are directed to cluster toolscomprising a buffer chamber as described herein having four facets. Afirst batch processing chamber is connected to one of the four facets. Asecond batch processing chamber is connected to a second of the fourfacets, next to the first of the four facets. A first loading stationand a second loading station are attached to the third facet and fourthfacet of the buffer chamber. Each of the first batch processing chamberand the second batch processing chamber can process n wafers at the sametime and the buffer chamber has a carousel with n+1 or n+2 supportpositions.

BRIEF DESCRIPTION OF THE DRAWINGS

So that the manner in which the above recited features of the presentinvention can be understood in detail, a more particular description ofthe invention, briefly summarized above, may be had by reference toembodiments, some of which are illustrated in the appended drawings. Itis to be noted, however, that the appended drawings illustrate onlytypical embodiments of this invention and are therefore not to beconsidered limiting of its scope, for the invention may admit to otherequally effective embodiments.

FIG. 1 shows a buffer chamber in accordance with one or more embodimentof the disclosure;

FIG. 2 shows an inner portion of a buffer chamber in accordance with oneor more embodiment of the disclosure;

FIG. 3 shows an inner portion of a buffer chamber in accordance with oneor more embodiment of the disclosure;

FIG. 4 shows a top view of a buffer chamber in accordance with one ormore embodiment of the disclosure;

FIG. 5 shows a side view of a robot and carousel in a buffer chamber inaccordance with one or more embodiment of the disclosure;

FIGS. 6A and 6B show transfer robots in accordance with one or moreembodiment of the disclosure;

FIG. 7 shows a transfer robot in accordance with one or more embodimentof the disclosure;

FIG. 8 shows a transfer robot in accordance with one or more embodimentof the disclosure;

FIGS. 9A and 9B show a transfer robot in accordance with one or moreembodiment of the disclosure;

FIGS. 10A and 10B show a transfer robot in accordance with one or moreembodiment of the disclosure;

FIGS. 11A-11C show a transfer robot in accordance with one or moreembodiment of the disclosure;

FIGS. 12A and 12B show a transfer robot in accordance with one or moreembodiment of the disclosure;

FIGS. 13A and 13B show a transfer robot in accordance with one or moreembodiment of the disclosure;

FIG. 14 shows a cluster tool in accordance with one or more embodimentof the disclosure;

FIG. 15 shows a cluster tool in accordance with one or more embodimentof the disclosure;

FIG. 16 shows a buffer chamber in accordance with one or more embodimentof the disclosure;

FIG. 17 shows a primary shield for a buffer chamber in accordance withone or more embodiment of the disclosure;

FIG. 18 shows a buffer chamber in accordance with one or more embodimentof the disclosure;

FIG. 19 shows a buffer chamber in accordance with one or more embodimentof the disclosure;

FIG. 20 shows a primary shield and a secondary shield for a bufferchamber in accordance with one or more embodiment of the disclosure;

FIG. 21 shows a buffer chamber in accordance with one or more embodimentof the disclosure; and

FIGS. 22 through 30 show a cluster tool in use with a buffer chamber inaccordance with one or more embodiment of the disclosure.

DETAILED DESCRIPTION

Before describing several exemplary embodiments of the invention, it isto be understood that the invention is not limited to the details ofconstruction or process steps set forth in the following description.The invention is capable of other embodiments and of being practiced orbeing carried out in various ways. It is also to be understood that thecomplexes and ligands of the present invention may be illustrated hereinusing structural formulas which have a particular stereochemistry. Theseillustrations are intended as examples only and are not to be construedas limiting the disclosed structure to any particular stereochemistry.Rather, the illustrated structures are intended to encompass all suchcomplexes and ligands having the indicated chemical formula.

A “substrate” as used herein, refers to any substrate or materialsurface formed on a substrate upon which film processing is performedduring a fabrication process. For example, a substrate surface on whichprocessing can be performed include materials such as silicon, siliconoxide, strained silicon, silicon on insulator (SOI), carbon dopedsilicon oxides, silicon nitride, doped silicon, germanium, galliumarsenide, glass, sapphire, and any other materials such as metals, metalnitrides, metal alloys, and other conductive materials, depending on theapplication. Substrates include, without limitation, semiconductorwafers. Substrates may be exposed to a pretreatment process to polish,etch, reduce, oxidize, hydroxylate, anneal and/or bake the substratesurface. In addition to film processing directly on the surface of thesubstrate itself, in the present invention, any of the film processingsteps disclosed may also be performed on an underlayer formed on thesubstrate as disclosed in more detail below, and the term “substratesurface” is intended to include such underlayer as the contextindicates. Thus for example, where a film/layer or partial film/layerhas been deposited onto a substrate surface, the exposed surface of thenewly deposited film/layer becomes the substrate surface.

Embodiments of the disclosure are directed to apparatus and methods forpreheating wafers on an ALD platform using a buffer chamber. Preheatingin the buffer chamber can be accomplished using an internal carouselmechanism that positions wafers for heating while a wafer transfer robotsimultaneously transfers other wafers in the carousel to the processchamber and loadlocks.

FIGS. 1 through 5 show a buffer chamber in accordance with one or moreembodiments of the disclosure. The embodiments shown are merelyexemplary and should not be taken as limiting the scope of thedisclosure. A buffer chamber 1100 includes a housing 1101 with a lid1102, a floor 1103 and a sidewall 1104. The sidewall has a number offacets 1105 which can be used to form a connection with various chambersand processing equipment. The buffer chamber 1100 has at least twofacets 1105 so that at least two components can be connected to thebuffer chamber 1100. The embodiment shown in the drawings has fourfacets 1105, but those skilled in the art will understand that this ismerely one possible configuration. In one or more embodiments, there aretwo, three, four, five, six, seven, eight, nine or ten facets.

Each of the facets 1105 has a slit valve 1106 that is sized to allow atleast a wafer to pass therethrough. In some embodiments the slit valve1106 is sized to allow a wafer and a robot blade to pass through. FIG. 3shows a batch processing chamber 1180 with a separate slit valve 1181that can be positioned adjacent the slit valve of the buffer chamber1100. In some embodiments, each of the facets has a slit valve. In oneor more embodiments, there are two, three, four, five, six, seven,eight, nine, ten or more slit valves. In some embodiments, there aremore slit valves than facets, allowing for more than one slit valve onany given facet. In some embodiments, there are four slit valves whichallow access to four sides of the housing. In one or more embodiments,two of the four slit valves are aligned with batch processing chambers.

The buffer chamber 1100 includes a carousel 1110 with at least two wafersupport positions 1111. The carousel 1110 can be connected to the lid1102 of the housing 1101 or the floor 1103 of the housing 1101. Thecarousel 1110 can have any suitable number of wafer support positions1111 depending on, for example, the length of time for preheating andthe number of wafers that can be processed at the same time in aconnected batch processing chamber 1180. The carousel 1110 shown inFIGS. 1-5 includes four wafer support positions 1111, however, more orless can be included. In some embodiments, the carousel 1110 comprisesin the range of 2 and 12 wafer support positions, or in the range of 3and 10 wafer support positions 1111, or in the range of 4 and 8 wafersupport positions 1111.

In some embodiments, each of the wafer support positions 1111 areseparated from adjacent support positions by a wall 1115. The wall 1115may help provide isolation between support positions 1111 that areindexed beneath a heat source and support positions that are not under aheat source. In some embodiments, the carousel 1110 comprises two,three, four, five, six, seven, eight, nine, 10, 11, 12, 13, 14, 15, 16or more support positions. In one or more embodiments, the carouselcomprises 7 or 8 support positions and the housing is connected to oneor two batch processing chambers that can process six wafers at the sametime.

The carousel 1110 may hang from the lid of the buffer chamber 1100directly above a robot 1140. A feedthrough 1112 (see FIG. 6A) may beincorporated that has acceptable particle performance (e.g.,ferrofluidic, airbearing). The feedthrough 1112 may allow for rotarymotion of the carousel 1110 while forming a passthrough for any cablesor fluids.

A heating module 1130 is positioned above at least some of the wafersupport positions 1111 corresponding to a carousel index position. Acarousel index position is any position where at least one wafer supportposition 1111 is located adjacent a slit valve 1106. The heating module1130 can be any suitable wafer heating device including, but not limitedto, a lamp module, an LED lamp module, a resistive heating element, orany other radiant heater. While a wafer is positioned under the heatingmodule 1130, the heating module 1130 is enabled and heats the wafer fora predetermined period of time to a predetermined temperature. In someembodiments, the heating module 1130 is located to the side of thecarousel to heat at least one wafer support position 1111. In one ormore embodiments, the heating module 1130 is located beneath at leastsome of the wafer support positions 1111 corresponding to a carouselindex position.

In some embodiments, the heating module 1130 is positioned adjacent eachof the processing chamber slit valves 1181 so that when the carousel1110 is in an index position with a wafer adjacent the slit valve 1181,there is a support position 1111 located beneath each heating module1130 adjacent the processing chamber slit valves 1181. For example, ifthere are two processing chambers 1180 positioned adjacent the bufferchamber 1100, a heating module 1130 is positioned at each of the indexpositions adjacent the slit valves 1181 associated with the processingchambers 1180. In some embodiments, there are more heating modules 1130than processing chamber slit valves 1181. In some embodiments, there isat least one processing chamber slit valves 1181 that does not have aheating module 1130 adjacent thereto.

The distance between the heating module 1130 and the substrate surfacecan vary depending on, for example, the type of heater. In someembodiments, each of the at least one heating modules 1130 is located adistance from the carousel 1110 so that when a wafer 1116 is present,the distance D is in the range of about 0.0005 inches (0.01 mm) to about3 inches (76 mm). In one or more embodiments, the distance D is in therange of about 0.02 mm to about 50 mm, or in the range of about 0.05 mmto about 40 mm, or in the range of about 0.1 mm to about 35 mm, or inthe range of about 10 mm to about 45 mm, or in the range of about 20 mmto about 40 mm. In some embodiments, at least one heating module 1130comprises a lamp and the distance D is in the range of about 20 mm andabout 40 mm. A lamp used in this context is any radiant light sourceother than an LED which irradiates 1131 the substrate surface. In one ormore embodiments, at least one heating module 1130 comprises LEDs andthe distance D is in the range of about 5 mm to about 10 mm. In someembodiments, at least one heating module 1130 comprises a resistiveheater and the distance D is less than or equal to about 1 mm. Someembodiments include collimating optics (not shown) which can be used toproject light to greater distances with better efficiency than rapidthermal processing (RTP) lamps. In one or more embodiments, the heatingmodule 1130 comprises a radiant light source, and collimating optics arepositioned between the heating module 1130 and the carousel 1110. In oneor more embodiments, the heating module 1130 is positioned a distance Dup to about 25 inches (˜65 mm) from the substrate surface. In someembodiments, the heating module 1130 is positioned to the side of thesubstrate and collimating optics are configured to project light ontothe substrate.

The distance D between the heating module 1130 and the wafer surface isnot static. Rather, the wafer may be moved closed to or further from theheating module 1130 during the pre-heating process. For example, duringloading and unloading of a wafer onto the carousel 1110, the distance Dis variable. While during heating, the distance D is typicallymaintained relatively consistent.

A motor 1118 is connected to the carousel 1110 to index the carousel1110 so that at least one support position 1111 is aligned with a slitvalve 1106 in one of the facets 1105. The motor 1118 can be any suitabletype of motor that can rotate and/or lift the carousel 1110. The motor1118 of some embodiments can rotate the carousel, or index the carousel,in discrete steps or continuously.

A wafer transfer robot 1140 is positioned below the carousel 1110 tomove a wafer the wafer support position 1111 and another area. Otherareas include, but are not limited to, a susceptor in a batch processingchamber and a loadlock chamber. The wafer transfer robot 1140 of someembodiments can use z-axis movement to lift wafers on/off the carousel1110 and place the wafers to a facet position. In some embodiments,there are clearances or cutouts in the carousel 1110 for the robot blade1230 to pass through the mechanism. When the transfer is complete therobot 1140 drops below the mechanism and the carousel 1110 can freelyrotate to the next position. In some embodiments, after pre-heating orheating a wafer, the transfer robot 1140 can move and position the wafer1116 in a processing chamber 1180 aligned with a slit valve 1181 in atime less than about 3 seconds.

In some embodiments, wafer preheating occurs in one or more (n) carouselpositions preceding the exchange to the process chamber 1180 andloadlock. In one or more embodiments, the wafer spends 1+n completeexchange cycles (e.g., 15 sec×n) in preheat positions in parallel withthe wafer transfer sequence. The preheating can happen in parallel withother transfers and may have a limited effect on the system throughput.

In a traditional system, the wafer can take up to 10 seconds to betransferred from a preheat chamber to the process chamber. During this10 seconds the wafer loses a significant portion of the heat gained inthe preheat chamber. Thus, it is common to heat the wafer much highertemperatures to compensate for the heat loss. The carousel system of oneor more embodiments reduces this non-heating time significantly. A waferheating module exists in the buffer chamber directly in front of theprocess chamber. The wafer can be pre-heated until the moment before thewafer is put in the process chamber. In some embodiments, one robotextension with a wafer takes about 2 seconds, compared to a fulltransfer from another chamber taking about 10 seconds. The heat loss inthe carousel design is 80% less overall.

An exchange sequence in accordance with one or more embodiments of thedisclosure. In the embodiment described, a six wafer loadlock is fullwith six unprocessed wafers. The vacuum robot begins by queuing twowafers into the carousel of the buffer chamber 1100 before the processchamber has completed the process. The wafers in the buffer chamber arepreheated in the carousel. When the process chamber is complete, aprocessed wafer is transferred to an empty position on the carousel ofthe buffer chamber and an unprocessed wafer is transferred to anotherempty position on the carousel of the buffer chamber. The carouselindexes one slot. The unprocessed wafer begins heating and the heatedwafer is transferred into the process chamber. The process chamberindexes and the cycle continue until all the processed wafers arereplaced with unprocessed wafers.

In some embodiments, improving the speed and efficiency of the carouselmechanism is assisted by novel robot linkage designs to providesimultaneous exchanges with the process chamber and loadlock. Thelinkage layouts of various embodiments have 90 orientations and 180degree orientation of each blade for handing the wafer. In someembodiments, the carousel system has no robot linkage components existabove the wafer or it would interfere with the carousel mechanism.Additionally most of the linkages are in the same plane making therobots relatively short in comparison to other designs. The robotgeometries of some embodiments align both wafers on substantially thesame plane and at the highest position in the robot base, arm, linkagestack. As used in this specification and the appended claims, the term“substantially the same plane” and the like means that the elements arecoplanar within about 10 mm, 5 mm, 4 mm, 3 mm, 2 mm or 1 mm. In additionto allowing the use of the carousel, positioning the robot mechanismbelow the wafers is considered ideal for particle performance. Someembodiments of alternate linkage designs have applications beyond thecarousel architecture. If the platform throughput is low enough, thecarousel would work well with many traditional single arm robots widelyavailable today.

Embodiments of the transfer robots can be separated into two broadgroups: a short armset robot on a long boom; and a long armset robot ona short boom. Referring to FIGS. 6A and 6B, one or more embodiments of ashort armset robot on a long boom are described. A wafer transfer robot1200 includes a boom 1210 that supports at least one armset 1220. Theboom 1210 shown is L-shaped, or a 90° boom. The boom 1210 has a firstleg 1211 and a second leg 1213 attached at a corner of central portion1212. Even though the boom 1210 is an integral component and the legs1211, 1213 are not separate pieces, the term “attached”, “connected”,and the like, used in this regard, refer to the intersection ofdifferent legs and does not mean that there are separate components. Theembodiment shown in FIGS. 6A and 6B include two armsets 1220. Each ofthe armsets 1220 have a lower arm 1222 attached to the boom 1210 at ashoulder 1224. An upper arm 1226 is attached to the lower arm 1222 at anelbow 1228. A blade 1230 is attached to the upper arm 1226 at a wrist1232. The blade 1230 is on top of the upper arm 1226, the upper arm 1226is on top of the lower arm 1222 and the lower arm 1222 is on top of theboom 1210 and no part of the transfer robot 1200 extends above the blade1230 that can interfere with the carousel.

A short armset robot on a long boom is defined so that the combinedlength of the armset from shoulder to an end of the blade has a lengththat is up to about 2 times the length from a pivot point 1215 of theboom 1210 to the shoulder 1224. In some embodiments, a short armsetrobot on a long boom has a shoulder 1224 to end 1231 of blade 1230length that is up to about 2.25, 2.5, 2.75 or 3 times the length fromthe pivot point 1215 of the boom 1210 to the shoulder 1224.

A long armset robot on a short boom is defined so that the combinedlength of the armset 1220 from shoulder 1224 to an end 1231 of the blade1230 has a length that is greater than about 2.5 times a length from apivot point 1215 of the boom 1210 to the shoulder 1224. In someembodiments, the long armset robot on a short boom has an armset lengthgreater than about 2.75, 3, 3.25 or 3.5 times the length from the pivotpoint 1215 of the boom 1210 to the shoulder 1224.

In a short armset on long boom type configuration, a base or boomextends a shorter linkage arm set close to the process chamber opening.The shorter linkage design allows for a light weight and thin linkagedesign optimal for extension into a process chamber. The longer boom canbe made thick and stiff. The effect is a very stable and fast robotdesign for wafer transfer. The wafers are on the same transfer plane andat a 90 degree orientation.

Referring again to FIGS. 6A and 6B, the boom 1210 is L-shaped and has anarmset 1220 at an end 1216 of each leg 1211, 1213 of the boom 1210. Eacharmset 1220 extends along an axis 1240 of the leg 1213 of the boom 1210so that in a retracted position (FIG. 6A) the blade 1230 is parallel toand positioned over the leg 1211 of the boom 1210 with the wrist 1232adjacent an angled portion of the L-shaped boom 1210. The angled portionof the boom 1210 is the same region as the connection of the legs 1211,1213.

The transfer robot 1200 of some embodiments includes a pulley whichcauses the shoulder 1224, elbow 1228 and wrist 1323 to extendsubstantially simultaneously so that the blade 1230 remains parallel tothe leg 1213 during extension. As used in this specification and theappended claims, the term “substantially simultaneously” means that themovement of the armset components occurs at the same time, and does notmean that the movement of the various components occurs at the samerate.

FIG. 7 shows an embodiment of the transfer robot 1200 in which the boom1210 is X-shaped. The robot 1200 has an armset 1220 at an end 1216 ofeach leg 1211 of the boom 1210. Each armset 1220 extends along an axisof the leg 1211 of the boom 1210 so that in a retracted position (shownin FIG. 7) the blade 1230 is parallel to and positioned over the leg1211 of the boom 1210 with the wrist 1232 adjacent a central portion1212 of the X-shaped boom 1210.

In this short armset on long boom variant, simultaneous exchange of fourwafers can be accomplished. In some embodiments, this configuration canbe used to replace rotating of the entire robot assembly; instead therobot's primary axis of rotation remains stationary. This might providea significant throughput benefit in a multi-step sequence process byenabling four simultaneous exchanges.

FIG. 8 shows a transfer robot 1200 in which the boom 1210 is I-shaped orstraight and has an armset 1220 at each end 1216 of the boom 1210. Eacharmset extends along an axis 1240 of the boom 1210 so that in aretracted position (shown) the blade 1230 is parallel to and positionedover the boom 1210 with the wrist 1232 adjacent a central portion 1212of the I-shaped boom 1210.

This variant of the short armset with long boom design positions therobot extension arms at a 180 degree orientation. This type of short armand long boom design might be able to achieve many 2× arm orientationconfigurations to provide quick sequential exchanges with processchambers in many cluster tools.

FIGS. 9A and 9B show a long armset short boom with 45 degree offset. Inthis configuration, the base or boom arm extends to attach the linkagearmset at a 45 degree angle offset from the centerline and closer to thechamber. This enables a longer linkage arm design which extends thetotal reach of the robot. This also allows for longer blade lengths andless arm inside the process chamber. The boom 1210 is I-shaped andpositioned at 45° to a major axis 1240 of the movement of the blades1230. Here, the blade 1230 is offset 1250 so that a majority portion1252 of the blade 1230 lies along the major axis 1240 of the movementand a portion 1254 of the blade 1230 adjacent the wrist 1232 lies at 45°to the major axis 1240. Upon full extension of the armset 1220, thelower arm 1222, upper arm 1226, shoulder 1224, elbow 1228 and wrist 1232are parallel to and offset from the major axis 1240.

FIGS. 10A and 10B show another embodiment of the short boom design thatpositions the center other arm linkage in the center of the extensionfacet instead of offset. This shortens the arms and blades and allowsfor a relatively small sweep diameter. In this embodiment, the boom 1210is L-shaped and has an armset 1220 at an end 1216 of each leg 1211 ofthe boom 1210. Each armset 1220 extends along an axis 1240 of the leg1211 of the boom 1210 so that in a retracted position (FIG. 10A) theblade 1230 is parallel to and positioned over the leg 1211 of the boom1210 with the wrist 1232 adjacent an angled central portion 1212 portionof the L-shaped boom 1210. When the armset 1220 is extended (as shown inFIG. 10B) the lower arm 1222, upper arm 1226 and blade 1230 liesubstantially along axis 1240.

FIGS. 11A to 11C show another embodiment of a robot 1200 using stackedScara linkages with 90 degree Planar Blades. The configuration is avariant of the standard stacked linkage design with two arms. Thelinkages are positioned so that the blades 1230 with wafers 1116 canextend to two facets at 90 degrees. In conjunction with a carouseldesign the extension of one blade 1230 is dependent on the extension ofthe other blade 1230. An advantage of this configuration is that verylong blades and/or blade adaptors can be used so that the robot works ina standard slit opening and bearings in the wrist 1232 are kept very faraway from heated process chamber components. The wafer transfer robot1200 shown includes a base 1310 which can be a boom 1210 or otherstationary or rotatable component. A first armset 1320 a comprises afirst lower arm 1322 a connected to the base 1310 at a first shoulder1324 a. A first upper arm 1326 a is connected to the first lower arm1322 a at a first elbow 1328 a. A first blade 1330 a is connected to thefirst upper arm 1326 a at a first wrist 1332 a. As shown in FIG. 11C,the first blade 1330 a has a first inner blade portion 1340 a extendinga first length from the first wrist 1332 a to a first lower corner 1342a. A first intermediate blade portion 1344 a extends perpendicularlyfrom the first inner blade portion 1340 a to a first upper corner 1346a. A first outer blade portion 1348 a extends perpendicularly to thefirst intermediate blade portion 1344 a in a direction away from andparallel to the first inner blade portion 1340 a. A second armset 1320 bcomprises a second lower arm 1322 b connected to the base 1310 at asecond shoulder 1324 b. A second upper arm 1326 b is connected to thesecond lower arm 1322 b at a second elbow 1328 b. A second blade 1330 bis connected to the second upper arm 1326 b at a second wrist 1332 b.The second blade 1330 b has a similar construction as that of the firstblade 1330 a shown in FIG. 11C. The second blade has a second innerblade portion 1340 b extends a second length from the second wrist 1332b to a second lower corner 1342 b. A second intermediate blade portion1344 b extends perpendicularly from the second inner blade portion 1340b to a second upper corner 1346 b and a second outer blade portion 1348b extends perpendicularly to the second intermediate blade portion 1344b in a direction away from and parallel to the second inner bladeportion 1340 b. The first length is greater than the second length andthe first outer blade portion 1348 a and the second outer blade portion1348 b support wafers substantially coplanarly. In some embodiments, thesecond armset 1320 b cannot extend until the first armset 1320 a hasextended, and the first armset 1320 a cannot retract until the secondarmset 1320 b has retracted.

FIGS. 12A and 12B show another embodiment of a long armset on shortboom. In this configuration, the boom 1210 is offset from the centerlineof the facet. A traditional scara linkage design is positionedside-by-side with an offset blade/blade adaptor. The two blades 1230that hold the wafers are stacked and positioned at 180 degrees from eachother with the wafers on the same plane for carousel operation. Oneadvantage of this configuration is the robot arms, bearings, wrist, etc.are all below the wafer transfer plane so they do not interfere with thecarousel mechanism. The robot 1200 comprises a boom 1210 with an I-shapehaving a first end 1216 and a second end 1216. The first armset 1420 acomprising a first lower arm 1422 a connected to the boom 1210 at afirst shoulder 1424 a at the end of the boom. A first upper arm 1426 ais connected to the first lower arm 1422 a at a first elbow 1428 a. Afirst blade portion 1430 a is connected to the first upper arm 1426 a ata first wrist 1432 a. The first blade 1430 a has a first inner bladeportion 1440 a extending a first length from the first wrist 1432 a to afirst lower corner 1442 a, a first intermediate blade portion 1444 aextends perpendicularly from the first inner blade portion 1440 a to afirst upper corner 1446 a and a first outer blade portion 1448 a extendsperpendicular to the first intermediate blade portion 1444 a in adirection away from and parallel to the first inner blade portion 1430a. The second armset 1420 b comprises a second lower arm 1422 bconnected to the boom 1210 at a second shoulder 1424 b at the second endof the boom 1210. A second upper arm 1426 b is connected to the secondlower arm 1422 b at a second elbow 1428 b. A second blade 1430 b isconnected to the second upper arm 1426 b at a second wrist 1432 b. Thesecond blade 1430 b has a second inner blade portion 1440 b extending asecond length from the second wrist 1432 b to a second lower corner 1442b. A second angled blade portion 1443 b extends at an angle to and alongthe plane of the second inner blade portion 1440 b. A secondintermediate blade portion 1444 b extends perpendicularly from thesecond angled blade portion 1443 b to a second upper corner 1446 b and asecond outer blade portion 1448 b extends in a plane perpendicular tothe second intermediate blade portion 1444 b in a direction away from,parallel to and offset from the second inner blade portion 1440 b. Whenin the retracted position, the second outer blade portion 1448 b isabove the first inner blade portion 1440 a and the first outer bladeportion 1448 a is above and offset from the second inner blade portion1440 b. The first outer blade portion 1448 a and the second outer bladeportions 1448 b are substantially coplanar.

FIGS. 13A and 13B show a stacked long armset robot 1280 in accordancewith another embodiment of the disclosure. In this robot configuration,the lower arms 1282 are stacked for a simple coaxial drive mechanism butthe upper arms 1286 are coplanar. This allows for a simpler drivemechanism without the need for the “boom” but keeps all the mechanicalsbelow the wafer transfer plane. This configuration also keeps the wafersin the same wafer transfer plan.

The specific number of wafers in the carousel can impact throughput. Inone embodiment, as shown in FIG. 14, seven carousel positions 1460 areavailable to support the six wafer batch processing chambers 1470. Thisapproach decouples the loadlock cycle from the process chamber cycle andallows the cycles to work in parallel improving throughput of thesystem. An advantage of an n+1 wafer carousel design is that it enablesthe use of simpler single arm robot with the throughput cost of all theadditional rotations. In addition the preheat time available issignificantly higher in the n+1 carousel configuration.

Each additional carousel position generally provides another exchangecycle (˜15 s) of wafer heating time. Not all positions of the carouselmight have lamp modules, or not all lamp modules are used. Only enoughmodules are used to achieve the predetermined temperature, making thecarousel configurable for the application.

In another embodiment with a six wafer batch processing chamber 1470, asshown in FIG. 15, each facet 1462 of the chamber 1100 is at 90 degrees.Eight wafer carousel positions 1460 are shown. Here, a wafer will alwaysbe aligned with one of the process chamber facets enabling the dualsimultaneous exchanges between chambers and loadlocks. This with furtherimprove the throughput of the system.

Numerous heating devices can be configured to the carousel system.Standard lamp modules that radiate heat from 3000 K lamps may be used,especially when heating wafers over 300° C. in a short period of time.Lamp modules are fairly large and might pose some integration risk inthe carousel configuration since they would typically operate on aline-of-sight through the transfer chamber lid. Alternately, LED Lampmodules might be configured below the lip of transfer chamber lidallowing for more integration space and/or more carousel positions. Thinresistive type heaters could also be used in the same application. Theheaters could either rotate with the carousel or be stationary in thebuffer chamber.

When the robot is positioned below these high temperature heatingelements it might be beneficial to shield the robot from exposure toheat. The carousel wafer heating concept utilizes at least one lamp orLED type heaters positioned on the top of the buffer chamber. Theselamps or heaters are used to heat the wafers positioned on the carouselbelow the lamps and above the transfer robot. When the lamps are turnedon the radiant energy from the lamps heats everything below the lampmodule including the robot. The lamps emit a significant amount ofinfrared light energy that passes thru the silicon wafers and isabsorbed by the robot without adequate shielding. The energy absorbed bythe robot affects the reliability and life of the robot components. FIG.16 shows the robot's exposure to radiant heat, especially when the robotblade 1230 is extended. The portion 1233 of the extended robot blade1230 within the chamber 1100 is subjected to radiant heating when therobot blade 1230 is extended because there is no physical barrierbetween the radiant heat source and the portion 1233 of the robot blade1230. The radiant heat source is not shown in FIG. 16, but exists abovethe plane of the page as viewed.

Referring to FIG. 17, in some embodiments, the bottom of the carouselhas a large mirror finish shield 1500 capable of reflecting radiantenergy from the lamps. Cutouts 1510 in the shield 1500 allow the robotto pick up and blade wafers on the wafer supports. The wafer supportscan either be part of the primary shield 1500 or an additionalsupporting structure. The primary shield 1500 of some embodiments islocated between the carousel and the transfer robot to shield the robotfrom at least one heating module. Shielding, as used herein, does notmean that the robot is completely protected from exposure to the heatingmodule but merely means that the amount of radiant energy, for example,from the heating module is attenuated or partially blocked. FIGS. 18 and19 show the robot's exposure to radiant heat using a primary shield1500.

The primary shield 1500 of some embodiments protects most of the exposedareas of the robot. However, the large cutouts 1510 for the robot blade1230 still expose the robot arms and linkages to the radiant lamp energypassing through and radiating from the wafer. In some embodiments, asecond half circle shield, or secondary shield 1520 is positioned belowthe first shield or primary shield 1500. The secondary shield 1520 canbe, for example, attached to an independent rotation access that allowsrotating under the non-transfer heating positions to reflect lampirradiation that passes through the cutouts in the primary shield 1500.FIGS. 20 and 21 show the combination of primary shield 1500 andsecondary shield 1520 and the robot exposure using both shields. Thecombined effect of the thermal shielding prevents the robot from beexposed to direct radiation from the lamp modules during the waferheating process. The shields could also be cooled to reduce the amountof radiation from them to the robot.

Additional embodiments of the disclosure are directed to cluster tools.Referring to FIG. 22, a cluster tool 2000 comprises a buffer chamber1100 according to any of the described embodiments. The buffer chamber1100 shown has four facets 1105. A first batch processing chamber 2100is connected to one of the four facets 1105 and a second processingchamber 2200 is connected to a second of the four facets 1105. In thisembodiment, the first and second processing chambers are attached tofacets that are adjacent to each other. In some embodiments, each of thefirst batch processing chamber 2100 and the second batch processingchamber 2200 can process n wafers at the same time and the bufferchamber 1100 has a carousel with n+1 or n+2 support positions. In theembodiment shown in FIGS. 22 through 30, the buffer chamber 1100 holdsfour wafers. This is merely for illustrative purposes and should not betaken as limiting the scope of the disclosure.

Referring to FIGS. 22 through 30, a portion of a process sequence isdescribed. In FIG. 22, each of the wafers in the first processingchamber 2100 have been processed and the wafers are to be replaced withunprocessed wafers. In this Figure, there are no wafers in the bufferchamber 1100. In FIG. 23, robot 2220 a picks up a new wafer 2361 fromloadlock 2300 a. In FIG. 24, the new wafer 2361 is loaded into thebuffer chamber 1100 and indexed to a position between loadlock 2300 aand loadlock 2300 b. Once the new wafer 2361 has rotated to a positionadjacent loadlock 2300 b, as shown in FIG. 25, the new wafer 2361 issubjected to heat from the heating module. At the same time, robot 2220a picks up another new wafer 2362 from loadlock 2300 a and robot 2220 bpicks up a processed wafer 2461 from the processing chamber 2100. Bothwafers are loaded into the buffer chamber 1100 by retracting the robots.The carousel in the buffer chamber 1100 is indexed, as shown in FIG. 26.In FIG. 27, the carousel has been indexed again and the robot 2220 b haspositioned now pre-heated wafer 2361 into the processing chamber 2100.The processing chamber 2100 carousel is rotated to position anotherprocessed wafer 2462 adjacent the slit valve 1106, as in FIG. 28. FIG.29 shows the processed wafer 2462 being removed from the processingchamber 2100 at the same time that unprocessed wafer 2363 is picked upfrom loadlock 2300 a. In FIG. 30, the process has continued so thatprocessing chamber 2100 now holds wafer 2361 and wafer 2362. Unprocessedwafer 2363 is still in the buffer chamber 1100 being pre-heated.Processed wafer 2461 has been unloaded from the buffer chamber 1100 intothe loadlock 2300 a and processed wafer 2462 is still in the bufferchamber 1100. The process will continue in this manner until all of theprocessed wafers have been removed from processing chamber 2100 andreplaced with pre-heated unprocessed wafers from loadlock 2100 a. Afterthe wafers of processing chamber 2100 have been replaced, the robotswill move so that the wafers from processing chamber 2200 can bereplaced with unprocessed wafers from loadlock 2300 b in the samemanner.

A first embodiment of the disclosure is directed to a buffer chambercomprising: a housing with a lid, a floor and at a sidewall having atleast two facets, each of the facets including a slit valve sized toallow a wafer to pass therethrough; a carousel including a wafer supporthaving at least two wafer support positions; at least one heating modulelocated above the carousel to heat a wafer when supported by the wafersupport; a wafer transfer robot below the carousel to move a waferbetween one or more areas and at least one of the wafer supportpositions; and a motor connected to the carousel to index the carouselso that at least one support position is aligned with a slit valve inone of the facets.

In a second embodiment, the first embodiment is modified wherein thecarousel is connected to the lid of the housing. In a third embodiment,the first embodiment is modified wherein the carousel is connected tothe floor of the housing.

In a fourth embodiment, any of the first through third embodiments aremodified so that the wafer support of the carousel has at least onecutout to provide clearance for the wafer transfer robot.

In a fifth embodiment, any of the first through fourth embodiments aremodified wherein the carousel comprises in the range of 4 and 8 wafersupport positions.

In a sixth embodiment, any of the first through fifth embodiments aremodified wherein each of the wafer support positions are separated fromadjacent support positions by a wall.

In a seventh embodiment, any of the first through sixth embodiments aremodified wherein there are four slit valves allowing access to foursides of the housing. In an eighth embodiment, the seventh embodiment ismodified wherein two of the four slit valves are aligned with batchprocessing chambers. In a ninth embodiment, the seventh or eighthembodiment are modifieid wherein each batch processing chamber canprocess six wafers at a time. In a tenth embodiment, any of the sevenththrough ninth embodiments are modified wherein the carousel comprisesseven support positions. In an eleventh embodiment, any of the sevenththrough tenth embodiments are modified wherein the carousel compriseseight support positions. In a twelfth embodiment, any of the sevenththrough eleventh embodiments are modified wherein a heater is positionedadjacent each of the processing chamber slit valves so that when thecarousel is in an index position there is a support position locatedbeneath each heater adjacent the processing chamber slit valves.

In a thirteenth embodiment, any of the first through twelfth embodimentsare modified wherein each of the at least one heating module isindependently selected from the group consisting of lamps, resistiveheaters and LEDs. In a fourteenth embodiment, the thirteenth embodimentis modified wherein each of the at least one heating modules is locateda distance from the carousel so that when a wafer is present, thedistance is in the range of about 0.0005 inches to about 3 inches. In afifteenth embodiment, the thirteenth or fourteenth embodiment ismodified wherein at least one heating module comprises a lamp and thedistance is in the range of about 20 mm and about 40 mm. In a sixteenthembodiment, any of the thirteenth through fifteenth embodiment ismodified wherein at least one heating module comprises LEDs and thedistance is in the range of about 5 mm to about 10 mm. In a seventeenthembodiment, any of the thirteenth through sixteenth embodiments aremodified wherein at least one heating module comprises a resistiveheater and the distance is less than about 1 mm.

In an eighteenth embodiment, any of the first through seventeenthembodiments are modified wherein after heating a wafer, the transferrobot can move and position the wafer in a processing chamber alignedwith a slit valve in a time less than about 3 seconds. In a nineteenthembodiment, any of the first through eighteenth embodiments are modifiedwherein the housing has four facets.

In a twentieth embodiment, any of the first through nineteenthembodiments further comprise a primary shield located between thecarousel and the transfer robot to shield the robot from the at leastone heating module. In a twenty-first embodiment, the twentiethembodiment is modified wherein the primary shield comprises at least onecutout to allow a blade of the transfer robot to access the carousel. Ina twenty-second embodiment any of the twentieth through twenty-firstembodiment further comprise a secondary shield under the primary shield.

In a twenty-third embodiment, any of the first through twenty-secondembodiments are modified wherein the carousel moves in the z-axis sothat, when a wafer is present, lowering the carousel causes a wafer toremain on a blade of the transfer robot and raising the carousel liftsthe wafer off of the blade of the transfer robot.

In a twenty-fourth embodiment, any of the first through twenty-thirdembodiments are modified wherein the transfer robot can move in alongthe z-axis to that a blade of the transfer robot can lift a wafer fromthe carousel or lower a wafer onto the carousel.

In a twenty-fifth embodiment, any of the first through twenty-fourthembodiments are modified wherein the wafer transfer robot includes aboom that supports at least one armset, each of the at least one armsethaving a lower arm attached to the boom at a shoulder, an upper armattached to the lower arm at an elbow and a blade attached to the upperarm at a wrist, so that the blade is on top of the upper arm, the upperarm is on top of the lower arm and the lower arm is on top of the boomand no part of the transfer robot extends above the blade interferingwith the carousel.

In a twenty-sixth embodiment, the twenty-fifth embodiment is modifiedwherein the transfer robot is a short armset robot on a long boom sothat the combined length of the armset from shoulder to an end of theblade has a length that is up to about 2.5 times a length from a pivotpoint of the boom to the shoulder. In a twenty-seventh embodiment, thetwenty-fifth embodiment is modified wherein the transfer robot is a longarmset robot on a short boom so that the combined length of the armsetfrom should to an end of the blade has a length that is greater thanabout 2.5 times a length from a pivot point of the boom to the shoulder.

In a twenty-eighth embodiment, the twenty-fifth embodiment is modifiedwherein the boom is L-shaped and has an armset at an end of each leg ofthe boom, each armset extending along an axis of the leg of the boom sothat in a retracted position the blade is parallel to and positionedover the leg of the boom with the wrist adjacent an angled portion ofthe L-shaped boom. In a twenty-ninth embodiment, the twenty-eighthembodiment is modified wherein the transfer robot includes a pulleywhich causes the shoulder, elbow and wrist to extend substantiallysimultaneously so that the blade remains parallel to the leg duringextension.

In a thirtieth embodiment, the twenty-fifth embodiment is modifiedwherein the boom is X-shaped and has an armset at an end of each leg ofthe boom, each armset extending along an axis of the leg of the boom sothat in a retracted position the blade is parallel to and positionedover the leg of the boom with the wrist adjacent a central portion ofthe X-shaped boom. In a thirty-first embodiment, the thirtiethembodiment is modified wherein the transfer robot includes a pulleywhich causes the shoulder, elbow and wrist to extend so that the bladeremains parallel to the leg during extension.

In a thirty-second embodiment, the twenty fifth embodiment is modifiedwherein the boom is I-shaped and has an armset at an end of each end ofthe boom, each armset extending along an axis of the boom so that in aretracted position the blade is parallel to and positioned over the boomwith the wrist adjacent a central portion of the I-shaped boom. In athirty-third embodiment, the thirty-second embodiment is modifiedwherein the transfer robot includes a pulley which causes the shoulder,elbow and wrist to extend so that the blade remains parallel to the boomduring extension.

In a thirty-fourth embodiment, the twenty-second embodiment is modifiedwherein the boom is I-shaped and positioned at 45° to a major axis ofthe movement of the blade. In a thirty-fifth embodiment, thethirty-fourth embodiment is modified wherein the blade is offset so thata majority of the blade lies along the major axis of the movement and aportion of the blade adjacent the wrist lies at 45° to the major axis,so that upon full extension of the armset, the lower arm, upper arm,shoulder, elbow and wrist are parallel to and offset from the majoraxis.

In a thirty-sixth embodiment, the twenty-seventh embodiment is modifiedwherein the boom is L-shaped and has an armset at an end of each leg ofthe boom, each armset extending along an axis of the leg of the boom sothat in a retracted position the blade is parallel to and positionedover the leg of the boom with the wrist adjacent an angled portion ofthe L-shaped boom. In a thirty-seventh embodiment, the thirty-sixthembodiment is modified wherein the transfer robot includes a pulleywhich causes the shoulder, elbow and wrist to extend substantiallysimultaneously so that the blade remains parallel to the leg duringextension.

In a thirty-eighth embodiment, any of the first through twenty-fourthembodiment are modified wherein the wafer transfer robot comprises: abase; a first armset comprising a first lower arm connected to the baseat a first shoulder, a first upper arm connected to the first lower armat a first elbow, a first blade connected the first upper arm at a firstwrist, the first blade having a first inner blade portion extending afirst length from the first wrist to a first lower corner, a firstintermediate blade portion extending perpendicularly from the firstinner blade portion to a first upper corner and a first outer bladeportion extending perpendicular to the first intermediate blade portionin a direction away from and parallel to the first inner blade portion;and a second armset comprising a second lower arm connected to the baseat a second shoulder, a second upper arm connected to the second lowerarm at a second elbow, a second blade connected to the second upper armat a second wrist, the second blade having a second inner blade portionextending a second length from the second wrist to a second lowercorner, a second intermediate blade portion extending perpendicularlyfrom the second inner blade portion to a second upper corner and asecond outer blade portion extending perpendicularly to the secondintermediate blade portion in a direction away from and parallel to thesecond inner blade portion, wherein the first length is greater than thesecond length and the first outer blade portion and the second outerblade portion can support wafers substantially coplanarly.

In a thirty-ninth embodiment, the thirty-eighth embodiment is modifiedwherein the second armset cannot extend until the first armset hasextended and the first armset cannot retract until the second armset hasretracted. In a fortieth embodiment, any of the thirty-eighth throughthirty-ninth embodiments are modified wherein the base is rotatable.

In a forty-first embodiment, any of the first through twenty-fourthembodiments are modified wherein the wafer transfer robot comprises: aboom having an I-shape with a first end and a second end; a first armsetcomprising a first lower arm connected to the boom at a first shoulderat the first end of the boom, a first upper arm connected to the firstlower arm at a first elbow, a first blade connected the first upper armat a first wrist, the first blade having a first inner blade portionextending a first length from the first wrist to a first lower corner, afirst intermediate blade portion extending perpendicularly from thefirst inner blade portion to a first upper corner and a first outerblade portion extending perpendicular to the first intermediate bladeportion in a direction away from and parallel to the first inner bladeportion; and a second armset comprising a second lower arm connected tothe boom at a second shoulder at the second end of the boom, a secondupper arm connected to the second lower arm at a second elbow, a secondblade connected to the second upper arm at a second wrist, the secondblade having a second inner blade portion extending a second length fromthe second wrist to a second lower corner, a second angled blade portionextending at an angle to and along the plane of the second inner bladeportion, a second intermediate blade portion extending perpendicularlyfrom the second angled blade portion to a second upper corner and asecond outer blade portion extending in a plane perpendicular to thesecond intermediate blade portion in a direction away from, parallel toand offset from the second inner blade portion, wherein when in theretracted position, the second outer blade portion is above the firstinner blade portion and the first outer blade portion is above andoffset from the second inner blade portion, and the first outer bladeportion and the second outer blade portions are substantially coplanar.

In a forty-second embodiment, the forty-first embodiment is modifiedwherein when the armset is extended through a slit valve to place awafer into a processing chamber, the wrist of the armset does not extendcompletely into the processing chamber.

A forty-third embodiment is directed to a wafer transfer robotcomprising: an L-shaped boom having a first leg with a first end, asecond leg with a second end, the first leg and second leg connected atan angled portion; an armset attached to each of the first end andsecond send of the boom, each armset having a lower arm attached to theboom at a shoulder adjacent the first end or second end, an upper armattached to the lower arm at an elbow and a blade attached to the upperarm at a wrist; and a pulley which causes the shoulder, elbow and wristto extend substantially simultaneously so that the blade remainsparallel to the leg during extension, wherein the transfer is a shortarmset robot on a long boom so that the combined length of the armsetfrom shoulder to an end of the blade has a length that is up to about2.5 times a length from a pivot point in the angled portion of the boomto the shoulder.

A forty-fourth embodiment is directed to a wafer transfer robotcomprising: an L-shaped boom having a first leg with a first end, asecond leg with a second end, the first leg and second leg connected atan angled portion; an armset attached to each of the first end andsecond send of the boom, each armset having a lower arm attached to theboom at a shoulder adjacent the first end or second end, an upper armattached to the lower arm at an elbow and a blade attached to the upperarm at a wrist; and a pulley which causes the shoulder, elbow and wristto extend substantially simultaneously so that the blade remainsparallel to the leg during extension, wherein the transfer is a longarmset robot on a short boom so that the combined length of the armsetfrom should to an end of the blade has a length that is greater thanabout 2.5 times a length from a pivot point in the angled portion of theboom to the shoulder.

A forty-fifth embodiment is directed to a wafer transfer robotcomprising: an I-shaped boom having a first end, a second end and apivot point; an armset attached to each of the first end and second sendof the boom, each armset having a lower arm attached to the boom at ashoulder adjacent the first end or second end, an upper arm attached tothe lower arm at an elbow and a blade attached to the upper arm at awrist; and a pulley which causes the shoulder, elbow and wrist to extendsubstantially simultaneously so that the blade remains parallel to theleg during extension, wherein the transfer is a long armset robot on ashort boom so that the combined length of the armset from should to anend of the blade has a length that is greater than about 2.5 times alength from a pivot point in the angled portion of the boom to theshoulder, and the boom is positioned at an angle in the range of about30° to about 60° relative to a major axis of the movement of the blades.

In a forty-sixth embodiment, the forty-fifth embodiment is modifiedwherein each blade is offset so that a majority of the blade lies alongthe major axis of movement and a portion of the blade adjacent the wristlies at 45° to the major axis, so that upon full extension of thearmset, the lower arm, upper arm, shoulder, elbow and wrist are parallelto and offset from the major axis.

A forty-seventh embodiment is directed to a wafer transfer robotcomprising: a rotatable base; a first armset comprising a first lowerarm connected to the base at a first shoulder, a first upper armconnected to the first lower arm at a first elbow, a first bladeconnected the first upper arm at a first wrist, the first blade having afirst inner blade portion extending a first length from the first wristto a first lower corner, a first intermediate blade portion extendingperpendicularly from the first inner blade portion to a first uppercorner and a first outer blade portion extending perpendicular to thefirst intermediate blade portion in a direction away from and parallelto the first inner blade portion; and a second armset comprising asecond lower arm connected to the base at a second shoulder, a secondupper arm connected to the second lower arm at a second elbow, a secondblade connected to the second upper arm at a second wrist, the secondblade having a second inner blade portion extending a second length fromthe second wrist to a second lower corner, a second intermediate bladeportion extending perpendicularly from the second inner blade portion toa second upper corner and a second outer blade portion extendingperpendicularly to the second intermediate blade portion in a directionaway from and parallel to the second inner blade portion, wherein thefirst length is greater than the second length and the first outer bladeportion and the second outer blade portion can support waferssubstantially coplanarly, and the second armset cannot extend until thefirst armset has extended and the first armset cannot retract until thesecond armset has retracted.

A forty-eighth embodiment is directed to a wafer transfer robotcomprising: a rotatable boom having an I-shape with a first end and asecond end; a first armset comprising a first lower arm connected to theboom at a first shoulder at the first end of the boom, a first upper armconnected to the first lower arm at a first elbow, a first bladeconnected the first upper arm at a first wrist, the first blade having afirst inner blade portion extending a first length from the first wristto a first lower corner, a first intermediate blade portion extendingperpendicularly from the first inner blade portion to a first uppercorner and a first outer blade portion extending perpendicular to thefirst intermediate blade portion in a direction away from and parallelto the first inner blade portion; and a second armset comprising asecond lower arm connected to the boom at a second shoulder at thesecond end of the boom, a second upper arm connected to the second lowerarm at a second elbow, a second blade connected to the second upper armat a second wrist, the second blade having a second inner blade portionextending a second length from the second wrist to a second lowercorner, a second angled blade portion extending at an angle to and alongthe plane of the second inner blade portion, a second intermediate bladeportion extending perpendicularly from the second angled blade portionto a second upper corner and a second outer blade portion extending in aplane perpendicular to the second intermediate blade portion in adirection away from, parallel to and offset from the second inner bladeportion, wherein when in the retracted position, the second outer bladeportion is above the first inner blade portion and the first outer bladeportion is above and offset from the second inner blade portion, and thefirst outer blade portion and the second outer blade portions aresubstantially coplanar.

A forty-ninth embodiment is directed to a cluster tool comprising abuffer chamber according to any of the first through forty-secondembodiment having four facets; a first batch processing chamberconnected to one of the four facets; a second batch processing chamberconnected to a second of the four facets, next to the first of the fourfacets; and a first loading station and a second loading stationattached to the third facet and fourth facet of the buffer chamber,wherein each of the first batch processing chamber and the second batchprocessing chamber can process n wafers at the same time and the bufferchamber has a carousel with n+1 or n+2 support positions.

Reference throughout this specification to “one embodiment,” “certainembodiments,” “one or more embodiments” or “an embodiment” means that aparticular feature, structure, material, or characteristic described inconnection with the embodiment is included in at least one embodiment ofthe invention. Thus, the appearances of the phrases such as “in one ormore embodiments,” “in certain embodiments,” “in one embodiment” or “inan embodiment” in various places throughout this specification are notnecessarily referring to the same embodiment of the invention.Furthermore, the particular features, structures, materials, orcharacteristics may be combined in any suitable manner in one or moreembodiments.

Although the invention herein has been described with reference toparticular embodiments, it is to be understood that these embodimentsare merely illustrative of the principles and applications of thepresent invention. It will be apparent to those skilled in the art thatvarious modifications and variations can be made to the method andapparatus of the present invention without departing from the spirit andscope of the invention. Thus, it is intended that the present inventioninclude modifications and variations that are within the scope of theappended claims and their equivalents.

What is claimed is:
 1. A wafer transfer robot comprising: an X-shapedboom having a first end and a second end; an armset attached to each ofthe first end and second end of the X-shaped boom, each armset having alower arm attached to the X-shaped boom at a shoulder adjacent the firstend or second end, an upper arm attached to the lower arm at an elbowand a blade attached to the upper arm at a wrist, the armset extendingalong an axis of the leg of the X-shaped boom so that, in a retractedposition, the blade is parallel to and positioned over the leg of theX-shaped boom with the wrist adjacent to a central portion of theX-shaped boom; and a pulley which causes the shoulder, elbow and wristto extend substantially simultaneously so that the blade remainsparallel to the leg during extension.
 2. A wafer transfer robotcomprising: a rotatable base; a first armset comprising a first lowerarm connected to the base at a first shoulder, a first upper armconnected to the first lower arm at a first elbow, a first bladeconnected to the first upper arm at a first wrist, the first bladehaving a first inner blade portion extending a first length from thefirst wrist to a first lower corner, a first intermediate blade portionextending perpendicularly from the first inner blade portion to a firstupper corner and a first outer blade portion extending perpendicular tothe first intermediate blade portion in a direction away from andparallel to the first inner blade portion; and a second armsetcomprising a second lower arm connected to the base at a secondshoulder, a second upper arm connected to the second lower arm at asecond elbow, a second blade connected to the second upper arm at asecond wrist, the second blade having a second inner blade portionextending a second length from the second wrist to a second lowercorner, a second intermediate blade portion extending perpendicularlyfrom the second inner blade portion to a second upper corner and asecond outer blade portion extending perpendicularly to the secondintermediate blade portion in a direction away from and parallel to thesecond inner blade portion.
 3. The wafer transfer robot of claim 2,wherein the first length is greater than the second length and the firstouter blade portion and the second outer blade portion can supportwafers substantially coplanarly, and the second armset cannot extenduntil the first armset has extended and the first armset cannot retractuntil the second armset has retracted.
 4. The wafer transfer robot ofclaim 2, further comprising a pulley which causes the shoulder, elbowand wrist to extend so that the blade remains parallel to the boomduring extension.
 5. A wafer transfer robot comprising: a rotatable boomhaving an I-shape with a first end, a second end, and a pivot point; afirst armset comprising a first lower arm connected to the boom at afirst shoulder at the first end of the boom, a first upper arm connectedto the first lower arm at a first elbow, a first blade connected to thefirst upper arm at a first wrist, the first blade having a first innerblade portion extending a first length from the first wrist to a firstlower corner, a first intermediate blade portion extendingperpendicularly from the first inner blade portion to a first uppercorner and a first outer blade portion extending perpendicular to thefirst intermediate blade portion in a direction away from and parallelto the first inner blade portion; and a second armset comprising asecond lower arm connected to the boom at a second shoulder at thesecond end of the boom, a second upper arm connected to the second lowerarm at a second elbow, a second blade connected to the second upper armat a second wrist, the second blade having a second inner blade portionextending a second length from the second wrist to a second lowercorner, a second angled blade portion extending at an angle to and alongthe plane of the second inner blade portion, a second intermediate bladeportion extending perpendicularly from the second angled blade portionto a second upper corner and a second outer blade portion extending in aplane perpendicular to the second intermediate blade portion in adirection away from, parallel to and offset from the second inner bladeportion.
 6. The wafer transfer robot of claim 5, wherein, when in theretracted position, the second outer blade portion is above the firstinner blade portion and the first outer blade portion is above andoffset from the second inner blade portion, and the first outer bladeportion and the second outer blade portions are substantially coplanar.7. The wafer transfer robot of claim 5, further comprising a pulleywhich causes the shoulder, elbow and wrist to extend so that the bladeremains parallel to the boom during extension.
 8. The wafer transferrobot of claim 5, wherein the transfer robot is a long armset robot on ashort boom so that the combined length of the armset from shoulder to anend of the blade has a length that is greater than about 2.5 times alength from the pivot point in the angled portion of the boom to theshoulder, and the boom is positioned at an angle in the range of about30° to about 60° relative to a major axis of the movement of the blades.9. The wafer transfer robot of claim 8, wherein the long armset robot ona short boom has an armset length greater than about 3.5 times thelength from the pivot point in the angled portion of the boom to theshoulder.
 10. The wafer transfer robot of claim 5, wherein each blade isoffset so that a majority of the blade lies along the major axis ofmovement and a portion of the blade adjacent to the wrist lies at 45° tothe major axis, so that upon full extension of the armset, the lowerarm, upper arm, shoulder, elbow and wrist are parallel to and offsetfrom the major axis.
 11. The wafer transfer robot of claim 8, whereinthe wafer transfer robot can use z-axis movement to lift a wafer on/offa carousel and place the wafer to a facet position.